Chillers
Deep cryogenic ranges, within reach
New innovations in manufacturing technology call for lower temperatures. Chillers are temperature control devices with cooling and heating capabilities that work by cycling liquid coolant. Our chillers can maintain temperatures between -80℃ and 250℃, and have a cooling capacity ranging from 500W to 100KW.
Our Blog
Aperiam harum

Our Stories

This is some text inside of a div block.
10 Quick Tips About Blogging
Sit quam quae perferendis harum amet dolorum possimus minus. Occaecati magnam animi quasi dolor quae et aut. Autem voluptas alias nobis in odit. Aperiam harum eum modi neque. Ipsum iusto beatae et esse nobis illum hic natus. Sapiente non cumque quia facilis. Quo est odio culpa eaque sit ipsum mol
February 21, 2019
This is some text inside of a div block.
15 Best Blogs To Follow About Web Design
Maxime repellendus beatae asperiores. Est sapiente a et consectetur quo voluptate explicabo quis. Dignissimos error esse sapiente aperiam amet eum perspiciatis. Dolor totam voluptatum veritatis ex assumenda ut assumenda accus
February 21, 2019
This is some text inside of a div block.
7 of the Best Examples of Beautiful Blog Design
Harum et neque voluptate voluptatem aut quis culpa modi. Enim similique provident et libero quod magni soluta. Repudiandae deserunt architecto itaque repellat perfe
February 21, 2019
This is some text inside of a div block.
5 Principles Of Effective Web Design
Qui unde velit voluptatem architecto qui sequi et delectus. Dolore at quia et tempora maiores qui vel ipsam voluptas. Cupiditate qui vel. Placeat dolor ex voluptas architecto sit. Ea ad deserunt dicta et. Asperiores veniam voluptatum odio veritatis alias nihil. Dolor libero fac
February 21, 2019
This is some text inside of a div block.
14 Common Problems with modern Web Design
Est aperiam dolores fuga ut id. Itaque et minima quae similique aliquid. Est tempora aliquam quasi nihil dolores ut blanditiis dolor. Laboriosam omnis quae accusamus totam a totam eius. Est ad ea est autem ut iusto sed velit et. Possimus quos hic dolo
February 21, 2019
Grow your business.
Today is the day to build the business of your dreams. Share your mission with the world — and blow your customers away.
Start Now
Chillers
Deep cryogenic ranges, within reach
New innovations in manufacturing technology call for lower temperatures. Chillers are temperature control devices with cooling and heating capabilities that work by cycling liquid coolant. Our chillers can hit temperatures between -65℃ and 250℃, and have a cooling capacity ranging from 500W to 100KW.

Titania Series

Medium temperature line

Some Logic and CIS processes require high aspect ratio etch at a high productivity. The Titania series supports the temperature control and uniformity required for etch performance in terms of profile and defect densities needed for these applications.

Temperature Range
-10  to 80
Footprint
0.28 m2
Spec 3
Value 3
Titania Image

Dione Series

Low temperature line

Developed specifically for advanced applications in conductor and dielectric etch, the Dione series leverages the detailed engineering expertise of our development teams. As NAND and Logic etch geometries grow increasingly challenging, the Dione series supports ultra-low temperature requirements at high heat loads that change dynamically during the etch process.

Temperature Range
-45  to 60
Footprint
0.88 m2
Spec 3
Value 3

Proteus Series

Ultra-low temperature line

As the semiconductor industry moves beyond 3nm Logic and 200+ layer NAND, there is a need to manage extremely high dynamic heat loads during the etch process. The Proteus series is designed to reach sub -70℃ temperatures specifically to address this emerging challenge. This product family is ahead of its time and is currently in co-development partnership with key customers.

Temperature Range
-80  to 20
Footprint
0.82 m2
Spec 3
Value 3

CH-7 Series

Test-probe line

Probe-testing of fully processed die on wafer requires specific temperatures range, uniformity and ramp-rate requirements at a high throughput. The CP series of small chillers is designed to meet the needs of the test-probe industry. Typical temp range is around 25C. With increasing chip densities and die count per wafer, there is an even greater push to improve these key features. Shinwa’s chiller family for this segment incorporates product features to address these exact needs. Our products are designed in to leading semiconductor test-probe equipment.

Temperature Range
20  to 30
Footprint
0.36 m2
Spec 3
Value 3