Project #3
DESCRIPTION
Far far away, behind the word mountains, far from the countries Vokalia and Consonantia, there live the blind texts. Separated they live in Bookmarksgrove right at the coast.
When
January 2017
Who
Jason Davis, John Anderson, Mirco Cattabriga, Aaron Jones, Amanda Johnson, Steve McQueen
Far far away, behind the word mountains, far from the countries Vokalia and Consonantia, there live the blind texts. Separated they live in Bookmarksgrove right at the coast of the Semantics, a large language ocean. A small river named Duden flows by their place and supplies it with the necessary regelialia. It is a paradisematic country, in which roasted parts of sentences fly into your mouth.
‍
Far far away, behind the word mountains, far from the countries Vokalia and Consonantia, there live the blind texts. Separated they live in Bookmarksgrove right at the coast of the Semantics, a large language ocean. Far far away, behind the word mountains, far from the countries Vokalia and Consonantia, there live the blind texts. Separated they live in Bookmarksgrove right at the coast of the Semantics, a large language ocean. A small river named Duden flows by their place and supplies it with the necessary regelialia. It is a paradisematic country, in which roasted parts of sentences fly into your mouth.
‍
Far far away, behind the word mountains, far from the countries Vokalia and Consonantia, there live the blind texts. Separated they live in Bookmarksgrove right at the coast of the Semantics, a large language ocean.
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Dione
Developed specifically for advanced applications in conductor and dielectric etch, the Dione series leverages the detailed engineering expertise of our development teams. As NAND and Logic etch geometries grow increasingly challenging, the Dione series supports ultra-low temperature requirements at high heat loads that change dynamically during the etch process.
Applications
Etch
Spec 1
Value 1
Spec 2
Value 2
Spec 3
Value 3
Spec 3
Value 3
Spec 3
Value 3
Spec 3
Value 3
Temperature Range & Stability
Ch1
Ch2
Ch3
-45℃   to  60℃
30℃   to  120℃
10℃   to  60℃
Cooling Capacity
Ch1
Ch2
Ch3
-10℃   to  80℃
30℃   to  120℃
Value 1
Spec 3
Value 3
Spec 3
Value 3
Spec 3
Value 3
Channel 1
Channel 2
Channel 3
Temperature Range & Stability
-45℃  to 60℃
30℃  to 120℃
10℃  to 60℃
Cooling Capacity
<20 kW @ -40℃
<15 kW @ 50℃
<25 kW @ 10℃
Heating Capacity
6 kW
12 kW
—
Flowrate Range & Stability
30 LPM @ 1.5 MPa
30 LPM @ 1.5 MPa
30 LPM @ 1.5 MPa
Dimensions
325 mm W x 845 mm L x 1500 mm H