DESCRIPTION
Far far away, behind the word mountains, far from the countries Vokalia and Consonantia, there live the blind texts. Separated they live in Bookmarksgrove right at the coast.
When
January 2017
Who
Jason Davis, John Anderson, Mirco Cattabriga, Aaron Jones, Amanda Johnson, Steve McQueen
Far far away, behind the word mountains, far from the countries Vokalia and Consonantia, there live the blind texts. Separated they live in Bookmarksgrove right at the coast of the Semantics, a large language ocean. A small river named Duden flows by their place and supplies it with the necessary regelialia. It is a paradisematic country, in which roasted parts of sentences fly into your mouth.

Far far away, behind the word mountains, far from the countries Vokalia and Consonantia, there live the blind texts. Separated they live in Bookmarksgrove right at the coast of the Semantics, a large language ocean. Far far away, behind the word mountains, far from the countries Vokalia and Consonantia, there live the blind texts. Separated they live in Bookmarksgrove right at the coast of the Semantics, a large language ocean. A small river named Duden flows by their place and supplies it with the necessary regelialia. It is a paradisematic country, in which roasted parts of sentences fly into your mouth.

Far far away, behind the word mountains, far from the countries Vokalia and Consonantia, there live the blind texts. Separated they live in Bookmarksgrove right at the coast of the Semantics, a large language ocean.
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Titania
Some Logic and CIS processes require high aspect ratio etch at a high productivity. The Titania series supports the temperature control and uniformity required for etch performance in terms of profile and defect densities needed for these applications.
Applications
Etch
Spec 1
Value 1
Spec 2
Value 2
Spec 3
Value 3
Spec 3
Value 3
Spec 3
Value 3
Spec 3
Value 3
Temp. Range & Stability
Ch1
Ch2
Ch3
-10   to  80
30   to  120
Value 1
Spec 2
Value 2
Spec 3
Value 3
Spec 3
Value 3
Spec 3
Value 3
Spec 3
Value 3
Channel 1
Channel 2
Temperature Range & Stability
-10  to 80
30  to 120
Cooling Capacity
<4 kW @ -10
<3 kW @ 35
Heating Capacity
4 kW
Flowrate Range & Stability
30 LPM @ 1.5 MPa
30 LPM @ 1.5 MPa
Dimensions
325 mm W x 845 mm L x 1500 mm H