As the semiconductor industry moves beyond 3nm Logic and 200+ layer NAND, there is a need to manage extremely high dynamic heat loads during the etch process. The Proteus series is designed to reach sub -70℃ temperatures specifically to address this emerging challenge. This product family is ahead of its time and is currently in co-development partnership with key customers.
Temperature Range & Stability
Flowrate Range & Stability
325 mm W x 845 mm L x 1500 mm H